Synthesis and characteristics of maleic anhydride-based photopolymers with pendant POSS groups for negative tone photoresists

Haruka Onoda,Akira Takahashi,Nobuhito Ito, Kazuya Sato,Atsushi Kameyama

Journal of Photopolymer Science and Technology(2023)

引用 0|浏览2
暂无评分
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要