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Study of Dihedral-Corner-Reflector-Array Fabrication Process Using Soft X-ray Deep X-ray Lithography

Taki Watanabe,Sho Amano, Shinya Izawa,Satoshi Maekawa,Keisuke Yoshiki,Akinobu Yamaguchi,Yuichi Utsumi

Journal of Photopolymer Science and Technology（2023）

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