Island-ohmic-PGaN gate HEMT: Toward steep subthreshold swing and enhanced threshold stability
IEEE Electron Device Letters(2024)
摘要
An Island-Ohmic
p
-GaN gate (IO-PGaN) structure is proposed and fabricated on a GaN-on-Si wafer. Compared to the conventional Schottky- gate
p
-GaN HEMTs, the “floating”
p
-GaN layer is connected with the gate terminal via the heavily doped
p
+-GaN island in the IO-PGaN devices. A JFET-like structure formed by the Schottky-metal/
p
-GaN junction delivers a self-limited gate leakage. The proposed IO-PGaN HEMT alleviates the performance trade-off between the Ohmic- and Schottky gate technologies, delivering a limited gate leakage and a stable
V
TH
under gate/drain voltage stress conditions. Moreover, a TCAD simulation result and an energy band diagram are provided to illuminate the principle of enhanced
V
TH
stability of IO-PGaN devices.
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关键词
p-GaN gate HEMT,threshold voltage shift,leakage current
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