Strained Silicon Technology: Non-Destructive High-Lateral-Resolution Characterization Through Tip-Enhanced Raman Spectroscopy.
Applied Spectroscopy（2024）
Key words
Micro-Raman Spectroscopy,tip-enhanced Raman Spectroscopy,TERS,strain and stress,strained silicon,silicon-germanium,SiGe,epitaxial-on-silicon-on-insulator,SOI,semiconductors,nanoelectronic devices,nanoscale
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