Room temperature ZnO nanorods based TFT ammonia sensor: an experimental and simulation study

This study presents a method for growing and characterizing isolated and coalesced ZnO nanorods on a SiO2/p-Si substrate using the chemical bath deposition (CBD) technique. Characterizations of the nanorods were investigated using an X-ray diffractometer (XRD), atomic force microscopy (AFM), photoluminescence spectrofluorometer, and I–V parameter analyzer. The growth of ZnO nanorods significantly impacts the coalesced surface morphology and quantitative structural parameters. Potentiality of the ZnO nanorods based thin film transistor (TFT) as NH3 gas sensor has been explored. Experimental findings of the fabricated device structure were found to be well in agreement with the similar prototype structure simulated in TCAD environment. Maximum drain currents deviation between simulation and experimental study were found to be negligibly ± 0.2