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Damascene Versus Subtractive Line CMP Process for Resistive Memory Crossbars BEOL Integration

Raphael Dawant, Matthieu Gaudreau, Marc -Antoine Roy,Pierre-Antoine Mouny,Matthieu Valdenaire,Pierre Gliech,Javier Arias Zapata, Malek Zegaoui,Fabien Alibart,Dominique Drouin,Serge Ecoffey

MICRO AND NANO ENGINEERING（2024）

引用 2|浏览13
关键词
CMP,Resistive memory,Crossbar array,Damascene,Subtractive line,BEOL,Integration
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