8x8 Patch-Antenna-Coupled TeraFET Detector Array for Terahertz Quantum-Cascade-Laser Applications

Monolithically integrated, antenna-coupled field-effect transistors (TeraFETs) constitute rapid and sensitive detectors for the terahertz range (0.3 THz to 10 THz) that can operate at room temperature. Here, we conducted an experimental characterization of a single patch-antenna coupled TeraFET optimized for 3.4 THz operation. This characterization utilized a single-mode high-power terahertz Quantum-Cascade-Laser (QCL) emitting at the designated frequency (2.85 THz and 3.4 THz). Subsequently, we integrated 8x8 of the TeraFET elements into a parallel readout circuitry, facilitated by the process maturity of a commercial 65-nm process node. In this configuration, the entire TeraFET network operates as a unified pixel, amalgamating the output signals of all rectifying elements. We emphasize two significant enhancements for sensitive power detection experiments. Firstly, the larger detector area enhances alignment and signal stability. Additionally, it leads to a significantly reduced source–drain resistance, resulting in lower noise and enabling higher modulation bandwidth. In the following, we introduce a TeraFET-based detector system implementation achieving a bandwidth of 15 MHz. Furthermore, we show potential to extend achievable bandwidth up to 21 MHz . Finally, we validate the system's performance by employing high-resolution spectroscopic data to investigate methanol vapor in the vicinity of 3.4 THz with an estimated detection limit of 2.6e11 molecules/cm3.