Characterising and tackling thermally induced zero-drift in displacement measuring interferometry using temperature-controlled enclosure
arxiv(2024)
摘要
Our research efforts in displacement measurement interferometry focused on
long-term drifts initiated an extended experimental investigation in the
interferometric assemblies of our design. We aimed to analyze, characterize and
tackle the long-term measurement stability, expressed as the zero-drift, with
special attention to the thermal effects. For the experimentation, we developed
a thermostatic chamber equipped with an active temperature regulation, array of
sensors and control electronics. With either the finely stabilized temperature
or with the thermal cycling, we are able to carry out a range of
investigations: verification of modified design or prototype interferometers,
testing of production pieces, characterization of integrated assemblies and
units in terms of the zero drift and the susceptibility to thermal effect - the
temperature sensitivity, expressed as δ L / δ T in nm.K^-1.
Note: This is the version of the article before peer review or editing, as
submitted by an author to Measurement Science and Technology. IOP Publishing
Ltd is not responsible for any errors or omissions in this version of the
manuscript or any version derived from it.
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