Design and stability study of the sextupole precision mover for SAPS

Design the sextupole precision mover for the Southern Advanced Photon Source that has requirements exceeding commercially available machines. The design of the mover has been verified to meet the requirements through a combination of static and dynamic simulations using ANSYS software, as well as relevant experimental testing. The mover we constructed has an absolute positioning error of 2 and 3 µm, a maximum inclination angle of 1.55″ and 5.67″ in the horizontal and vertical motion directions respectively under a 400 kg load. Its vibration force transmission rate is 1.065. The mover utilizes a non-coupled structure consisting of four layers of stainless steel plates, which exhibits good manufacturability. It is capable of achieving high precision and stability under a 400 kg load, meeting the requirements.