Mechanism of electrical performance deterioration in a-Si:H TFTs caused by source/drain Decap treatmentWenxiang Chen, Xu Luo,Dan Liu,Faling Ling,Fang Wu,Gaobin Liu,Shufang Zhang,Hong Zhang,Wanjun Li,Liang FangMicroelectronics Reliability(2024)引用 0|浏览4暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要