Influence of Deposition Pressure on Microstructure, Mechanical and Electrical Properties of Niobium Thin Films
THIN SOLID FILMS（2024）
关键词
Niobium,Thin films,Sputtering,Microstructure,Resistivity,Residual stresses,X-ray reflectivity,Grazing incidence x-ray diffraction,Four point probe,Atomic force microscopy
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