Self-powered solar blind ultraviolet photodetector based on amorphous (In0.23Ga0.77)2O3/bixbyite (In0.67Ga0.33)2O3 heterojunction

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A(2024)

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Abstract
Self-powered solar-blind ultraviolet photodetectors are considered for potential applications in secure communication and space detection. However, high-quality p-type wide bandgap semiconductors are nonexistent due to the self-compensation effect, which makes the design of p-n homojunction photodetectors a challenging proposition to date. In this work, a self-powered solar-blind ultraviolet photodetector is fabricated and discussed, based on a novel heterojunction of (InxGa1-x)(2)O-3 ternary alloy films with two different compositions, which has a flexible design and can be easily fabricated for different applications. The heterojunction consists of an amorphous (In0.23Ga0.77)(2)O-3 on the top of a bixbyite (In0.67Ga0.33)(2)O-3 film prepared by radio frequency magnetron sputtering. The amorphous (In0.23Ga0.77)(2)O-3/bixbyite (In0.67Ga0.33)(2)O-3 heterojunction photodetector exhibits a responsivity of 5.78 mA/W, a detectivity of 1.69 x 10(11) cm Hz(1/2) W-1, and a high solar-blind UV (248 nm)/visible light (450 nm) rejection ratio of 1.39 x 10(3) at zero bias, suggesting decent spectral selectivity and high performance. The responsivity and peak wavelength of this photodetector can be tuned by the film thickness of the amorphous (In0.23Ga0.77)(2)O-3. This work provides a new design for self-powered solar-blind UV detectors based on ternary alloy heterojunctions.
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