Sub-wavelength coherent imaging of periodic samples using a 13.5 nm tabletop high harmonic light source
arxiv(2024)
摘要
Coherent diffractive imaging is unique as the only route for achieving
diffraction-limited spatial resolution in the extreme ultraviolet and X-ray
regions, limited only by the wavelength of the light. Recently, advances in
coherent short wavelength light sources, coupled with progress in algorithm
development, have significantly enhanced the power of x-ray imaging. However,
to date, high-fidelity diffraction imaging of periodic objects has been a
challenge because the scattered light is concentrated in isolated peaks. Here,
we use tabletop 13.5nm high harmonic beams to make two significant advances.
First we demonstrate high-quality imaging of an extended, nearly-periodic
sample for the first time. Second, we achieve sub-wavelength spatial resolution
(12.6nm) imaging at short wavelengths, also for the first time. The key to both
advances is a novel technique called modulus enforced probe, which enables
robust, quantitative, reconstructions of periodic objects. This work is
important for imaging next generation nano-engineered devices.
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