Mid-Infrared Silicon Nitride Metalens: Achieving High Achromaticity and Wideband Performance Trough Inverse Design Techniques

Abstract Inverse design with topology optimization considers a promising methodology for discovering new optimized photonic structure that enables to break the limitations of the forward or the traditional design especially for the meta-structure. This work presents a high efficiency mid infra-red imaging photonics element along mid infra-red wavelengths band starts from 2 µm to 5 µm based on silicon nitride optimized material structures. The first two designs are broadband focusing and reflective meta-lens under very high numerical aperture condition (NA = 0.9). The two designs are modeled by inverse design with topology optimization problem with Kreisselmeier-Steinhauser (k-s) aggregation objective function, while the final design is depended on novel inverse design optimization problem with double aggregation objective function that can target multi focal points along the wavelength band producing high efficiency achromatic broadband multi-focal meta-lens under very high numerical aperture (NA = 0.9).