Single- and Double-Layer Embedded Metal Meshes for Flexible, Highly Transparent Electromagnetic Interference Shielding

Mehdi Zarei,Mingxuan Li, Ekaterini Papazekos, Yang-Duan Su,Sneh Sinha, S. Brett Walker,Melbs Lemieux,Paul R. Ohodnicki,Paul W. Leu

ADVANCED MATERIALS TECHNOLOGIES(2024)

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摘要
Simulation and experimental studies are carried out on single-layer and double-layer embedded metal meshes (SLEMM and DLEMM) to assess their performance as transparent electromagnetic interference (EMI) shielding. The structures consist of silver meshes embedded in polyethylene terephthalate (PET). As a transparent electrode, SLEMMs exhibit a transparency of 82.7% and a sheet resistance of 0.61 omega sq-1 as well as 91.0% and 1.49 omega sq-1. This performance corresponds to figures of merit of 3101 and 2620, respectively. The SLEMMs achieve 48.0 dB EMI shielding efficiency (SE) in the frequency range of 8-18 GHz (X- and Ku-bands) with 91% visible transmission and 56.2 dB EMI SE with 82.7% visible transmission. Samples exhibit stable performance after 1000 bending cycles with a radius of curvature of 4 mm and 60 tape test cycles. DLEMMs consist of fabricating SLEMM on opposite sides of the substrate where the distance can be varied using a spacer. Simulations are performed to investigate how varying spacer distance between two layers of metal meshes influences the EMI SE. DLEMMs are fabricated and achieved an EMI SE of 77.7 dB with 81.7% visible transmission. SLEMMs and DLEMMs may have a wide variety of applications in aerospace, medical, and military applications. Simulation and experimental studies on single-layer and double-layer flexible embedded metal meshes are conducted to assess their performance as transparent electromagnetic interference shielding. Single-layer meshes achieve 91.0% T, 1.49 omega sq-1 sheet resistance, 2620 figure of merit, and 48.0 dB SE. Simulations are performed to investigate how varying spacer distance between two layers of metal meshes influences the EMI SE. image
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关键词
EMI shielding,flexible transparent conductive electrode,metal ink,metal mesh,photolithography,reactive ion etching (RIE)
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