Q-factor Improvement of Surface Ion Trap Fabrication

H. Y. Li, Morteza Ahmadi, Huihong Clarence Liu,Norhanani Jaafar, Mishra Dileep,Simon Chun Kiat Goh, YanYan Zhou,Manas Mukherjee

QUANTUM COMPUTING, COMMUNICATION, AND SIMULATION IV（2024）

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Surface ion trap on Si substrate,SiO2 isolation with Si trench,Glass substrate,Q-factor improvement

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