Higher Order Mode Elimination for SAW Resonators Based on LiNbO$_{3}$/SiO$_{2}$/poly-Si/Si Substrate by Si Orientation Optimization
Journal of Microelectromechanical Systems(2024)
AI Read Science
Must-Reading Tree
Example
![](https://originalfileserver.aminer.cn/sys/aminer/pubs/mrt_preview.jpeg)
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined