Multi-wavelength laser interferometer control system design
OPTICAL METROLOGY AND INSPECTION FOR INDUSTRIAL APPLICATIONS X(2023)
摘要
At present, based on the practical needs of multi-wavelength wavefront detection technology, a multi-wavelength laser interferometer optical structure has been designed based on the Fizeau interferometer. The structure uses a beam-splitting prism to integrate five wavelengths of laser light source, reduces the coaxial error of each part of the optical structure through a cage system, and adopts an achromatic lens as the collimation system and imaging system of the interferometer system. This paper develops and designs the multi-wavelength laser interferometer control system on this basis, adopts the servo as the transmission mechanism to realize the masking of different wavelength lasers, uses the stepper motor-based screw device, and redesigns the collimation system so that it can be controlled within 2 mm of the Z-axis to satisfy the requirement of collimation after switching different light sources, Simulation of stepper motors using Matlab/Simulink.The use of motorized devices can minimize the large systematic errors generated by readjusting the collimating objective lens after changing light sources, which is conducive to the engineering and promotion of multi-wavelength transmission wavefront detection technology.
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关键词
Transmission wavefront,Interferometer,Servo,Stepper motor,Simulink
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