Electroluminescence hyperspectral imaging of light-emitting diodes using a liquid crystal tunable filter

APPLIED PHYSICS LETTERS(2023)

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摘要
We demonstrate the use of a low-cost liquid-crystal-based wavelength-tunable filter and CMOS video camera to add hyperspectral imaging capabilities to a probe station equipped with a simple optical microscope. The resultant setup is used to rapidly resolve the spectral and spatial variations in electroluminescence typically observed for InxGa1-xN/GaN light-emitting diodes. Applying standard statistical analyses of variation within the multivariate datasets, such as moments and principal components, we observe inhomogeneities on a spectral scale significantly smaller than the bandwidth of the tunable filter. The resultant tool offers an alternative to scanning beam luminescence techniques for high-throughput hyperspectral analysis of optoelectronic devices. (c) 2023 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license (http:// creativecommons.org/licenses/by/4.0/).
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