Responsivity Enhancement of Wafer‐Bonded In0.53Ga0.47As Photo‐Field‐Effect Transistor on Si Substrate Via Equivalent Oxide Thickness Scaling
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE(2024)
关键词
EOT scaling,III-V and Si integration,InGaAs,photo-FET,SWIR detector
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