Perspective on integrated photonic devices using transparent conductive oxides: Challenges and opportunities

APPLIED PHYSICS LETTERS(2024)

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摘要
Transparent conductive oxides (TCOs) are gaining increasingly high research interest for integrated photonic devices due to the strong plasma dispersion effect and process compatibility with versatile optoelectronic platforms. In this perspective article, the authors gave a brief review of research efforts both on theoretical modeling and experimental demonstration of integrated photonic devices, especially on high-efficiency electro-optic modulators through the integration with plasmonics and silicon photonics. In addition, the authors discussed the challenge and opportunity associated with TCO photonic devices and the application in photonic integrated circuits (PICs) with emphasis on high mobility materials, high-speed E-O modulators, and large-scale integration. Finally, we conclude that collaboration with existing silicon photonics foundry is a necessary route to incorporate TCOs into existing PIC ecosystems.
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