Higher-order Resonance of Single-Crystal Diamond Cantilever Sensors Toward High F‧q Products
Applied physics express(2024)
Abstract
MEMS resonant sensing devices require both HF ( f ) and low dissipation or high quality factor ( Q ) to ensure high sensitivity and high speed. In this study, we investigate the resonance properties and energy loss in the first three resonance modes, resulting in a significant increase in f‧Q product at higher orders. The third order resonance exhibits an approximately 15-fold increase in f‧Q product, while the Q factor remains nearly constant. Consequently, we achieved an ultrahigh f‧Q product exceeding 10 ^12 Hz by higher-order resonances in single-crystal diamond cantilevers.
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Key words
diamond,MEMS,cantilevers,resonance,high orders
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