Evaluation of transducer for cryogenic actuators by equivalent circuit model

Cryogenic environments are increasingly used in scientific and industrial fields. Recently, cryogenic environments are also used for storage and supply of liquid hydrogen, which is considered essential for the realization of a decarbonized society. Actuators to drive a valve that controls such a low-temperature fluid are required. In this study, a piezoelectric transducer that can be driven in the cryogenic environment has been fabricated and evaluated. Although the performance of piezoelectric elements degrades at cryogenic temperatures in general, the application of a preload can suppress the degradation of performance. Equivalent circuits were used for evaluation, and force factors and figures of merit were compared. As a result, the force factor was as high as that at RT even at cryogenic temperatures, and a high figure of merit was obtained. The result indicates that the transducer can be used for the driving of micro actuator at cryogenic temperature.