Design and manufacturing of mid-infrared ultra-wide-angle antireflective composite micro-nano structure film
OPTICAL MATERIALS(2024)
摘要
Traditional homogeneous optical thin films encounter difficulties in minimizing reflected energy at steep angles due to polarization separation. We drew inspiration from the natural 'moth-eye' structure and devised an innovative antireflective micro-nano interface, which provides a solution for the limitations faced by traditional optical films. This study designed an ultra-wide-angle antireflective composite micro-nano structure film by combining interference cancellation principles with the sub-wavelength effects of the 'moth-eye' micro-nano structure surface. Through meticulous analysis employing rigorous coupled-wave analysis, we elucidated the functionality of the micro-nano structure in ensuring effective antireflection at large angles. The simulation results demonstrate the superior performance of the composite micro-nano structure film, showcasing a remarkable 35% enhancement in antireflection efficiency compared to traditional films for oblique incidence angles (70-80 degrees). Moreover, it outperformed traditional film technologies for smaller incident angles (0-60 degrees). Furthermore, we experimentally fabricated a double-sided composite SiO2 micro-nano structure film layer on a sapphire substrate using displacement Talbot lithography and inductively coupled plasma technology. Our experimental results aligned with the simulation results, holding significant implications for advancing optical windows in mid-infrared devices.
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关键词
Moth eye,Ultra-wide angle,Antireflection,Composite micro -nano structure,Rigorous coupled wave analysis
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