Chrome Extension
WeChat Mini Program
Use on ChatGLM
VIPCreated with Sketch.

Study of Silicon Surface Passivation by ZnOx/AlOx Stack Prepared Using Super-Cycle Approach in Thermal ALD Process

Abhishek Kumar,Meenakshi Devi,Shweta Tomer,Mrinal Dutta,Prathap Pathi, Vandana

SURFACES AND INTERFACES（2024）

Cited 2|Views11
Key words
Atomic layer deposition (ALD),ZnOx/AlOx stack,Al doped zinc oxide (AZO),Surface passivation,Super-cycle approach
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined