Wafer-Scale Al Junction Technology for Superconducting Quantum Circuits
IEEE Transactions on Applied Superconductivity（2024）
关键词
Junctions,Josephson junctions,Temperature measurement,Resists,Qubit,Fabrication,Resistance,Al Josephson junctions,circuits fabrication,deep sub-micrometer junctions,Manhattan junction technology,superconducting qubits,transmon qubit
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