Design, Fabrication, and Characterization of a Multi-curved Surface Fusion Metal Resonant Gyroscope

This paper presents the design, analysis, simulation, fabrication, and characterization of a multi-surface fusion metal resonant gyroscope. The gyroscope features a simple millimeter-scale resonator, composed of a metal structure and 16 piezoelectric electrodes. Compared to traditional metal resonant gyroscopes, this structure offers higher precision. The working principle of the gyroscope is introduced, the dynamic equations of the gyroscope structure are derived, and the displacement function of the gyroscope is obtained. Its functional principle is verified through finite element simulation. The vacuum heat treatment process for processing the gyroscope metal material is studied, and the gyroscope prototype metal structure is processed using precision turning and electrical discharge drilling techniques. The bonding process of the piezoelectric electrodes is optimized to improve positioning accuracy and ensure the high axial symmetry of the Overall structure. A low-error, low-noise multi-loop control system is designed, a gyroscope prototype is built, and test experiments are conducted on the prototype. At room temperature, the drive mode frequency of the gyroscope prototype is 7539.12 Hz, the sensing mode frequency is 7538.84 Hz, the frequency split is 0.28 Hz, the scale factor of the gyroscope prototype is 24.03 mV/°/s, the non-linearity of the scale factor is 105 ppm, the angle random walk is 0.687°/√h, and the zero bias instability is 0.468°/h.