Design of Fast Response Back-Illuminated 3D Composite Electrode Silicon Detector Utilizing the RIE-Lag Phenomenon
IEEE JOURNAL OF THE ELECTRON DEVICES SOCIETY（2024）
关键词
Electrodes,Detectors,Three-dimensional displays,Electric fields,Etching,Silicon,Electric potential,3DCESD,RIE-lag phenomenon,composite electrode,TCAD simulation,MIP,pulsed laser
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