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Low Temperature PECVD Processes for the Fabrication of Integrated Symmetrical Resonant UV210 Organic/Semiconductor Structures

MATERIALS TODAY COMMUNICATIONS(2024)

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Key words
Integrated organic photonic with PECVD,Semiconductor-On-Insulator with organic (SOI on Org.),Ellipsometric analyses,Raman analyses,XPS analyses,Resonators cavities
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