Interferometric microscale measurement of refractive index at VIS and IR wavelengths
arxiv(2024)
Abstract
Determination of refractive index of micro-disks of a calcinated
(1100^∘C in air) photo-resist SZ2080^TM was carried out using
transmission and reflection spectroscopy. Interference fringes at specific
wavenumbers/wavelengths were selected for determination of the optical
thickness, hence, the refractive index when the thickness of micro-disks was
measured by scanning electron microscopy (SEM). Refractive index of disks of
∼ 6± 1 μm thickness were determined at visible and IR (2.5-13 μm)
spectral ranges and where 2.2± 0.2 at visible and IR wavelengths.
Peculiarities of optical characterisation of micro-optical structures are
discussed in view of possible uncertainties in the definition of geometric
parameters, shape and mass density redistribution.
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