The regulation effect of trace amount of oxygen on the properties of p-type boron-doped diamond

Gengyou Zhao,Kun Tang,Yan Teng,Weikang Zhao,Kai Yang,Shunming Zhu,Shulin Gu

Journal of Materials Research（2024）

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摘要

The light doping behavior of boron in microwave plasma chemical vapor deposition diamond films by trace oxygen was investigated. As the oxygen concentration (O/C) increased from 0 to 5

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关键词

Diamond,Chemical vapor deposition (CVD) (deposition),Dopant,Hall effect,Raman spectroscopy

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