Conformal design and fabrication of wearable piezoelectric sensor array for spatiotemporal distribution of arterial pulse waves
2024 IEEE 37TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS(2024)
摘要
This paper reports a wearable piezoelectric pressure MEMS sensor array for multi-site conformal sensing of pulse waves. Thinned bulk lead zirconate titanate (PZT) piezoceramic films with high performance are embedded into soft materials, allowing optimal deformability and conformality. Specifically, a spin-on polymeric adhesive is adopted to transfer uniform PZT film during bonding and releasing processes. As a result, the device of single element exhibits high sensitivity with 47.45 mV/N. Furthermore, it can capture a weak pulse with the spatial and temporal distribution without cross talk among channels, which has great potential applications in the diagnosis of cardiovascular disease.
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关键词
Conformal Design,Piezoelectric Sensor Array,Pulse Perception,Spatiotemporal Distribution
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