Enhancing sensitivity of mode-localized accelerometers using asymmetrical coupled resonators

This paper presents a DETF (larger effective mass) and a clamped-clamped (C-C) beam (smaller effective mass) as the asymmetric coupled resonators rather than identical ones to improve sensitivity without weakening the coupling stiffness. Taking the ratio of the vibration amplitude (AR) of the resonator with a smaller effective mass to the resonator with a larger effective mass as the output, the sensitivity of the mode-localized accelerometer can be approximately improved to the ratio of the effective masses of the two resonators compared to symmetrically coupled resonators. The sensitivity of the mode-localized accelerometer enhanced about two times as the FEM simulation and experiments demonstrated, which also agrees with the analytic model we proposed. This method can also be used in other types of mode-localized sensors.