Enhanced electrical conductivity in laser-induced graphene-silicon carbide laminated nanosheets for flexible strain sensors and pulse wave velocity assessment

Yixin Liu, Yanru Chen, Zhibiao Wang,Min Zhang

2024 IEEE 37TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS(2024)

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摘要
The synthesis and integration methods of electrical materials are vital in Polydimethylsiloxane (PDMS)-based electronics and sensors. Here, we present a compact approach for the in-situ synthesis of laser-induced graphene-silicon carbide laminated nanosheets (LIG-SiC LNS) with enhanced electrical conductivity on a MoS2-PDMS hybrid precursor by laser direct scribing. We developed a flexible resistive strain sensor utilizing the simplified fabrication process of LIG-SiC LNS. The distinctive structure of the material enhances both the gauge factor (GF) and the intrinsic self-temperature compensation capability of the strain sensor. The sensor exhibits a maximum GF deviation of 1.88% within 20-35 degrees C without algorithmic compensation. In an application example, the sensor was utilized for assessing human pulse wave velocity (PWV), revealing a minimal deviation of 0.6% compared to a commercial instrument.
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关键词
Flexible strain sensor,Pulse wave velocity,Laser-induced graphene-silicon carbide,Laminated nanosheets,Self-temperature compensation
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