Polymethyl Methacrylate (PMMA) Pyrolysis Assisted Transfer of 2D Materials for Large-Scale Molybdenum Disulfide Nems Resonator Arrays
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)（2024）
关键词
2D NEMS,MoS2 resonators,PMMA pyrolysis,Large-scale resonator arrays,Device fabrication
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