Flexible High-Sensitivity Strain Sensor Fabricated with Pdms Micro-Channel Array Using Laser Transmission Pyrolysis Technology
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)(2024)
摘要
In recent years, flexible strain sensors based on metal cracks have garnered significant interest for their exceptional sensitivity. However, striking a balance between sensitivity and detection range remains a significant challenge, which often limits its wider application. Herein, we introduce an innovative laser transmission pyrolysis technology to fabricate high-performance flexible strain sensors based on (Au) metal cracks with a microchannel array on the PDMS surface. The fabricated flexible strain sensors exhibit high sensitivity, wide detection range, precise strain resolution, fast response and recovery times, and robust durability. Furthermore, this technology has potential applications in microfluidics, microelectromechanical systems, and optical sensing.
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关键词
Stretchable strain sensor,Metal film,UV laser,Laser transmission pyrolysis,PDMS pattering
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