Novel Fabrication of 4D Printed Optical Probe Array with Nanometer Aperture and Optical Spot Size Tunning
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)（2024）
Key words
4D printing,Two-photon nanolithography,Optical probe,Magnetic Actuation,Microfluidics
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined