S-rum technology for extreme miniaturization and integration of passive electronics and microfluidics

Zhendong Yang,Apratim Khandelwal, Paul Froeter, Kristen Nguyen, Allen T. Wang, Scott A. Wicker,Xiuling Li

2024 IEEE 37TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS(2024)

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摘要
Strain-induced Self-rolled-up membrane (S-RuM) technology is a paradigm-shifting fabrication scheme for extreme miniaturization and integration of passive electronic, photonic and microfluidic components. The overarching physical principle of S-RuM is strain-driven spontaneous deformation of 2D membranes into 3D architectures. In this talk, I will present several examples of S-RuM based applications including inductors, transformers, L-C filters, and waveguides, as well as microfluidic channels for neuron cell growth acceleration and DNA-based data storage.
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关键词
self-rolled-up membrane (S-RuM),microtubes,3D MEMS,inductors,bio-microfluidics
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