Erbium-Doped Rare-Earth Oxide Thin Film Waveguides for Integrated Quantum Photonic Devices

Xuejun Xu,Masaya Hiraishi,Tomohiro Inaba,Tai Tsuchizawa,Atsushi Ishizawa,Haruki Sanada,Takehiko Tawara,Jevon Longdell,Katsuya Oguri,Hideki Gotoh

2022 Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR)（2022）

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摘要

We have developed a low-loss waveguide platform for erbium-doped rare-earth oxide thin films grown on silicon substrate and investigated optical properties of erbium ions in waveguides at cryogenic temperature, aiming for integrated quantum photonic devices.

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关键词

Thin Films,Oxide Thin Films,Rare Earth Oxides,Silicon Substrate,Cryogenic Temperatures,High-quality,Scanning Electron Microscopy,Si Substrate,Thin Film Materials,Radiative Lifetime,Waveguide Width,Quantum Memory,High Doping Concentration,High Crystal Quality

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