Phase Sensitive Surface Profile Measurement Using Swept Multigigahertz Supercontinuum Comb
2022 Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR)(2022)
Abstract
A high-speed full-field surface profile measurement technique using frequency tunable supercontinuum multigigaherz comb was proposed. The phase modulation to the reference path of the microscopic interferometer resolved the previous non-measurable problem, and simultaneous detection of two modalities with amplitude and phase was realized. 3D measurements with a scan speed of 865 (depth) × 512 (length) × 640 (width) voxels/s was achieved. The depth resolution was improved to be approximately 30 μm.
MoreTranslated text
Key words
Profilometer,Supercontinuum,Phase Modulation,Light Source,Infrared Imaging,Central Wavelength,Interference Signal,Depth Direction,Interference Phase,Interference Microscopy
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined