Design and Implementation of a Flexible Electromagnetic Actuator for Tunable Terahertz Metamaterials

Actuators play a crucial role in microelectromechanical systems (MEMS) and hold substantial potential for applications in various domains, including reconfigurable metamaterials. This research aims to design, fabricate, and characterize structures for the actuation of the EMA. The electromagnetic actuator overcomes the lack of high drive voltage required by other actuators. The proposed actuator configuration comprises supporting cantilever beams with fixed ends, an integrated coil positioned above the cantilever's movable plate, and a permanent magnet located beneath the cantilever's movable plate to generate a static magnetic field. Utilizing flexible polyimide, the fabrication process of the EMA is simplified, overcoming limitations associated with silicon-based micromachining techniques. Furthermore, this approach potentially enables large-scale production of EMA, with displacement reaching up to 250 mu m under a 100 mA current, thereby expanding their scope of applications in manufacturing. To demonstrate the function of the EMA, we integrated it with a metamaterial structure to form a compact, tunable terahertz absorber, demonstrating a potential for reconfigurable electromagnetic space.