23.8 GHz Acoustic Filter in Periodically Poled Piezoelectric Film Lithium Niobate with 1.52 dB IL and 19.4
arxiv(2024)
摘要
This paper reports the first piezoelectric acoustic filter in periodically
poled piezoelectric film (P3F) lithium niobate (LiNbO3) at 23.8 GHz with low
insertion loss (IL) of 1.52 dB and 3-dB fractional bandwidth (FBW) of 19.4
The filter features a compact footprint of 0.64 mm2. The third-order ladder
filter is implemented with electrically coupled resonators in 150 nm bi-layer
P3F 128 rotated Y-cut LiNbO3 thin film, operating in second-order symmetric
(S2) Lamb mode. The record-breaking performance is enabled by the P3F LiNbO3
platform, where piezoelectric thin films of alternating orientations are
transferred subsequently, facilitating efficient higher-order Lamb mode
operation with simultaneously high quality factor (Q) and coupling coefficient
(k2) at millimeter-wave (mmWave). Also, the multi-layer P3F stack promises
smaller footprints and better nonlinearity than single-layer counterparts,
thanks to the higher capacitance density and lower thermal resistance. Upon
further development, the reported P3F LiNbO3 platform is promising for compact
filters at mmWave.
更多查看译文
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要