Technology of manufacturing thin-film aluminum nanostructures by dry aerosol printing

E. I. Kameneva,A. A. Lizunova,E. M. Filalova,D. Malo, D. V. Kornyushin,V. V. Ivanov

ST PETERSBURG POLYTECHNIC UNIVERSITY JOURNAL-PHYSICS AND MATHEMATICS(2023)

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摘要
The article under discussion is about technology of creating film structures from aluminum nanoparticles synthesized in spark discharge that can be used for plasmon amplification of the electromagnetic field in the ultraviolet range. Nanostructures of various patterns were applied by dry aerosol printing on a substrate of polished quartz glass. The dependences of the line width on the printing parameters such as focus, speed of sample movement and gas flow were studied. The optimal printing parameters were defined to produce thin-films with different patterns: grids, arrays of lines and uniform distribution of nanoparticles over the surface (films).
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关键词
nanoparticles,aluminum,plasmonic nanostructures,dry aerosol printing
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