AC Impedance Characteristics of Ferroelectric Hf0.5 Zr0.5 O2 : from 1 kHz to 10 GHz
2023 International Electron Devices Meeting (IEDM)（2023）
Abstract
We have carried out extensive characterization of the AC impedance of W/HZO/W ferroelectric structures from 1 kHz to 10 GHz. We have found that the distinct butterfly shape of the C-V characteristics persists up to the highest frequencies but its frequency dependence is extinguished around 1 GHz. We also find that the AC conductance increases with frequency. The frequency dispersion of capacitance is consistent with electron trapping at border traps close to the W/HZO interface. The C-V butterfly shape in the GHz range is postulated to arise from electron depletion and accumulation at the W/HZO interface. The frequency dependence of AC conductance is consistent with the universal dielectric response theory through the correlated barrier hoping model.
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Key words
AC Impedance,Butterfly,Frequency Dependence,Dependence Of Conductivity,Electron Trapping,Frequency Dispersion,GHz Range,Universal Response,Universal Theory,AC Conductivity,Electron Depletion,Exponent,Power-law,Equivalent Circuit,Polarization State,Interfacial Layer,Vector Network Analyzer,Equivalent Circuit Model,Domain Wall,Bias Point,Coplanar Waveguide,Excellent Match,Entire Frequency Range,Small-signal Model
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