Reducing two-level system dissipations in 3D superconducting Niobium resonators by atomic layer deposition and high temperature heat treatment
arxiv(2024)
Abstract
Superconducting qubits have arisen as a leading technology platform for
quantum computing which is on the verge of revolutionizing the world's
calculation capacities. Nonetheless, the fabrication of computationally
reliable qubit circuits requires increasing the quantum coherence lifetimes,
which are predominantly limited by the dissipations of two-level system (TLS)
defects present in the thin superconducting film and the adjacent dielectric
regions. In this paper, we demonstrate the reduction of two-level system losses
in three-dimensional superconducting radio frequency (SRF) niobium resonators
by atomic layer deposition (ALD) of a 10 nm aluminum oxide Al2O3 thin films
followed by a high vacuum (HV) heat treatment at 650 C for few hours. By
probing the effect of several heat treatments on Al2O3-coated niobium samples
by X-ray photoelectron spectroscopy (XPS) plus scanning and conventional high
resolution transmission electron microscopy (STEM/HRTEM) coupled with electron
energy loss spectroscopy (EELS) and (EDX) , we witness a dissolution of niobium
native oxides and the modification of the Al2O3-Nb interface, which correlates
with the enhancement of the quality factor at low fields of two 1.3 GHz niobium
cavities coated with 10 nm of Al2O3.
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