Damped silicon microprobes for high-speed roughness measurements
MikroSystemTechnik Congress 2021; Congress(2021)
摘要
A coating to increase the maximum probing speed of tactile cantilever sensors by increasing their damping is proposed. A corresponding deposition process is presented and first tests are performed. The coating thickness and the damping of the sensor, respectively, are evaluated in relation to the number of coatings that have been applied. Finally, the optimum coating thickness to maximize the probing speed is estimated.
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