300Mm Process Line for Qubit Fabrication
Hubert C. George,Kanwal Jit Singh,R. Pillarisetty,N. Thomas,Jelmer M. Boter,Delphine Brousse,Juan Pablo Dehollain,G. Droulers,GertJan Eenink,Nico W. Hendrickx,Nima Kalhor,Nodar Samkharadze,Amir Sammak,L. A. Yeoh,Diego Sabbagh,Giordano Scappucci,Menno Veldhorst,L. M. K. Vandersypen,James S. Clarke Bulletin of the American Physical Society（2018）
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