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The Influence of Substrate Temperature on the Structure and Optical Properties of NiO Thin Films Deposited Using the Magnetron Sputtering in the Layer-by-layer Growth Regime

A. I. Ievtushenko,V. A. Karpyna,O. I. Bykov,M. V. Dranchuk,O. F. Kolomys, D. M. Maziar,V. V. Strelchuk,S. P. Starik,V. A. Baturin,O. Y. Karpenko,O. S. Lytvyn

SEMICONDUCTOR PHYSICS QUANTUM ELECTRONICS & OPTOELECTRONICS（2023）

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关键词
NiO films,magnetron sputtering,XRD,substrate temperature,transmittance,atomic force microscopy
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