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Nondestructive, High-Resolution, Chemically Specific 3D Nanostructure Characterization Using Extreme Ultraviolet, Coherent Diffractive Imaging Reflectometry

Michael Tanksalvala,Yuka Esashi,Christina L. Porter,Nicholas W. Jenkins,Bin Wang,Zhe Zhang,Galen P. Miley,Naoto Horiguchi,Sadegh Yazdi,Chen-Ting Liao,Michael Gerrity,Henry C. Kapteyn,Margaret M. Murnane

Frontiers in Optics + Laser Science 2023 (FiO, LS)（2023）

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