Dynamic Micro-Vibration Measurement Based on Orbital Angular Momentum

In this study, we introduce a novel approach for dynamic micro-vibration measurement, employing an Orbital Angular Momentum (OAM) interferometer, where the reference beam is Gaussian (GS) and the measurement beam is OAM. The OAM light reflected back from the target carries information about the target's vibrations. The interference of the OAM light with Gaussian light generates petal-shaped patterns, and the target's vibration information can be measured by detecting the rotation angle of these petals. Our proposed method demonstrates enhanced tolerance to misalignment and superior precision. The effects of vibration frequency, CCD frame rates, and Topological Charges (TCs) on measurement accuracy are analyzed thoroughly. Experimental results reveal that the proposed method offers a higher accuracy (up to 22.34 nm) and an extended measurement range of (0-800 cm). These capabilities render our technique highly suitable for applications demanding nanometer-scale resolution in various fields, including precision engineering and advanced optical systems.